Filmetrics f50 manual

The Filmetrics FUV is a thin-film metrology tool which measures film thickness via spectral reflectance, with an automated stage to enable efficient collection of thickness uniformity maps. Features. Substrate size: ~5 mm × 5 mm to mm diameter; Thickness measurement range: 5 nm – 40 µm; Min. thickness to measure n and k: 50 nm. Filmetrics User Manual Prepared by Mark Richmond Page 3 of 3 Version Mar 23 General Precautions 1. Be familiar with use of Axiotron Microscope and how to operate it. 2. Software will need a baseline before the first use, anytime the light intensity has been adjusted, and anytime the magnification is changed. Baseline 1. The Filmetrics F50 in the spinner room allows quick and accurate measurement of most Brief agitation before removing for rinsing should be acceptable, but repeatable manual agitation during the process is impossible, so agitation should be avoided. Substrates.

The Filmetrics F50 in the spinner room allows quick and accurate measurement of most resist/film stacks. If your particular film stack is not available contact Photolith staff. EXPOSURE: Dose Characterization: Every combination of substrate, resist, photomask, and exposure tool is unique. DOSE. The Filmetrics F50 is an automated thin-film thickness mapping system equipped with a motorized r-theta stage that moves automatically to selected measurement points and provides thickness measurements as fast as two points per second. The system is capable of mapping wafers using predefined polar, rectangular or linear map patterns with center. Training for the FilMetrics systems is done with a training video available in CULearn as course RSRCH - CNF - FilMetrics Film Measurement. Once you have watched the entire video you are authorized to use the FilMetrics tools. The new FEXR is different from the F50/F20 shown in the video.

Thin film thickness measuring system with automated stage and wafer mapping. Filmetrics has fHC, F20, F32, F40, F50, ft and other products. It can measure samples from several mm to mm, and the film thickness can be measured. Filmetrics F Thin Film Mapping Analyzer. User Manual Filmetrics calibration sample: 1. Sample reflectance calibration region (go to 30,0).